MEMs_References

References

  1. What is MEMs Technology. MEMs Exchange. http://www.memsnet.org/mems/what-is.html. 2009.
  2. About MEMs. McWhorter, Paul. http://www.memx.com. 2008.
  3. "Micro-electrical-mechanical Systems." Wikipedia. http://en.wikipedia.org/wiki/Microelectromechanical_systems. 2009.
  4. "Electrostatics." Wikipedia. http://en.wikipedia.org/wiki/Electrostatics. 2009.
  5. "Wetting". Wikipedia. http://en.wikipedia.org/wiki/Wetting. 2009.
  6. "Who’s Who at NASA." Dr. Merrill, Walter. NASA Tech Brief. http://www.techbriefs.com/component/content/article/341. 1 January 2006.
  7. "Lithographie Galvanoformung Abformung Experts." Intota. http://www.intota.com/experts.asp? strSearchType=all&strQuery=Lithographie+Galvanoformung+Abformung. 2009.
  8. MEMs Technology at NASA’s Jet Propulsion Laboratory. MEMs Technology Group. NASA.
  9. Interconnection and Packaging Issues of Microelectromechanical Systems (MEMS) and COTS MEMS. Rajeshuni Ramesham Ph.D and Reza Ghaffarian Ph.D. NASA. 2000.
  10. COMMERCIAL-OFF-THE-SHELF MICROELECTROMECHANICAL SYSTEMS. Rajeshuni Ramesham and Reza Ghaffarian. NASA.
  11. Getters for Reliable Hermetic Packages. Rajeshuni Ramesham Ph.D. EEE Links. Vol 6. No.1. March 2000.
  12. QUALIFICATION AND RELIABILITY FOR MEMS AND IC PACKAGES. Reza Ghaffarian, Ph.D. NASA.
  13. Micro Electromechanical Systems Move Toward Standardization. Siebe Bouwstra, Mark da Silva, Gerold Schropfer. Coventor Inc.
  14. "Three New Standards for MEMs devices." Physorg. http://www.physorg.com/news405.html. 2004.
  15. "ASTM International." Wikipedia. http://en.wikipedia.org/wiki/ASTM. 2009.
  16. "Word Net Search." Princton. http://wordnetweb.princeton.edu/perl/webwn?s=nist
  17. "IEEE AND SEMI SIGN AGREEMENT TO FOSTER NANOTECHNOLOGY AND MEMS STANDARDS." IEEE. http://standards.ieee.org/announcements/pr_semimou.html. June 2004.
  18. "Welcome to SEMI." SEMI. http://www.semi.org/en/index.htm. 2009.

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